The Series KF151 Thermal Gas Mass Flow Controller

Control range from 1-100 SCCM to 3-300 SLPM

The Series KF151 Thermal Gas Mass Flow Controller is based on the principle of thermal conductivity. Through built-in heating elements and temperature sensors, it detects the rate at which heat is carried away by flowing gas. Using constant temperature difference or thermal diffusion technology, it converts flow signals into electrical signals for precise control. It can directly measure mass flow without requiring temperature and pressure compensation. Its applications are extensive: in semiconductor manufacturing, it precisely controls process gas flow to ensure chip fabrication accuracy; in the chemical industry, it manages reactor feed to enhance production stability; additionally, it is suitable for medical equipment gas rationing, environmental monitoring gas analysis, and laboratory gas flow regulation. This device serves as a critical measurement and control instrument in industrial automation and scientific research fields.

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